Problem stsetch2 SNF 2011-09-27 12:26:25: turbo down
eldwin at snf.stanford.edu
eldwin at snf.stanford.edu
Tue Sep 27 12:26:26 PDT 2011
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Problem stsetch2 SNF 2011-09-19 14:56:03: Chamber need to be cleaned
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Problem stsetch2 SNF 2011-09-27 15:47:50: lots of errors
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turbo pump error - wafers still inside
Previous message:
Problem stsetch2 SNF 2011-09-19 14:56:03: Chamber need to be cleaned
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Problem stsetch2 SNF 2011-09-27 15:47:50: lots of errors
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