Problem stsetch2 SNF 2011-09-30 09:53:29: more problems

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Fri Sep 30 09:53:29 PDT 2011


same problems as a few days ago.  after having already etched several wafers, the etched stopped in the middle of the recipe due to numerous faults including the pump turning off.  aborting everything and pumping to base seemed to work, but this shouldn't be a new condition of running the tool.  




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