September 2011 Archives by author

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Starting: Wed Sep 7 00:13:34 PDT 2011
Ending: Fri Sep 30 09:53:29 PDT 2011
Messages: 16

• Comment stsetch2 SNF 2011-09-16 13:17:01: residue on the backside of the wafers   cfchiang at snf.stanford.edu
• Shutdown stsetch2 SNF 2011-09-12 09:49:06: Lost communication with chamber TC   eenriquez at snf.stanford.edu
• Shutdown stsetch2 SNF 2011-09-12 09:49:06: Lost communication with chamber TC   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2011-09-11 13:48:42: chamber heater temp out of range   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2011-09-07 00:13:33: Chuck (platen) temp on screen -50C   eenriquez at snf.stanford.edu
• Comment stsetch2 SNF 2011-08-31 16:02:30: Update devicenet node 9 problem   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2011-08-06 17:50:43: STS2- DeviceNet 9 (platen chiller ) Comm Problem   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2011-09-19 14:56:03: Chamber need to be cleaned   eenriquez at snf.stanford.edu
• Comment stsetch2 SNF 2011-09-16 13:17:01: residue on the backside of the wafers   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2011-09-27 12:26:25: turbo down   eldwin at snf.stanford.edu
• Problem stsetch2 SNF 2011-09-27 15:47:50: lots of errors   grahamab at snf.stanford.edu
• Problem stsetch2 SNF 2011-09-30 09:53:29: more problems   grahamab at snf.stanford.edu
• Problem stsetch2 SNF 2011-09-07 00:13:33: Chuck (platen) temp on screen -50C   mislam at snf.stanford.edu
• Problem stsetch2 SNF 2011-09-12 20:50:02: Turbo shutdown on it's own   mislam at snf.stanford.edu
• Problem stsetch2 SNF 2011-09-19 14:56:03: Chamber need to be cleaned   wangss at snf.stanford.edu
• Problem stsetch2 SNF 2011-09-11 13:48:42: chamber heater temp out of range   ysohn at snf.stanford.edu

Last message date: Fri Sep 30 09:53:29 PDT 2011
Archived on: Sun Dec 23 09:23:25 PST 2012

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