From eenriquez at snf.stanford.edu  Wed Apr  4 12:26:40 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 4 Apr 2012 12:26:40 -0700
Subject: Problem stsetch2 SNF 2012-04-04 12:26:39: Needs process qualification
Message-ID: <mailman.1134.1356283393.4670.stsetch2-pcs@snf.stanford.edu>

Completed reassembly.  Ran O2 plasma and Smooth-Shallow recipe.
Need to run a complete process qualification.



From mcvittie at snf.stanford.edu  Wed Apr  4 17:23:55 2012
From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu)
Date: Wed, 4 Apr 2012 17:23:55 -0700
Subject: Problem stsetch2 SNF 2012-04-04 17:23:54: Rf source not going to set point
Message-ID: <mailman.1135.1356283393.4670.stsetch2-pcs@snf.stanford.edu>

For a 800 unswitched O2 clean, set point is 800w but source is only getting to 617w. For switched process (jim-etch-1) the set points are 2500/2000w but I am only getting 2170/1713w.  Could not get serial connection to work between laptop and generator to see what generator thinks it is doing. Process did not give  error although power was way low. 
  jim



From eenriquez at snf.stanford.edu  Thu Apr  5 08:08:34 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 5 Apr 2012 08:08:34 -0700
Subject: Problem stsetch2 SNF 2012-04-04 17:23:54: Rf source not going to set point
Message-ID: <mailman.1136.1356283393.4670.stsetch2-pcs@snf.stanford.edu>

Secured connector and power cycled the generator



From eenriquez at snf.stanford.edu  Thu Apr 12 12:53:00 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 12 Apr 2012 12:53:00 -0700
Subject: Comment stsetch2 SNF 2012-04-12 12:52:59: Update
Message-ID: <mailman.1137.1356283393.4670.stsetch2-pcs@snf.stanford.edu>

The Coil rf generator is out of calibration.  We are sending it out for recal and it should be ready by 4/18.  The system should be ready by 4/19



From eenriquez at snf.stanford.edu  Thu Apr 19 07:03:50 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 19 Apr 2012 07:03:50 -0700
Subject: Comment stsetch2 SNF 2012-04-19 07:03:49: Update RF generator
Message-ID: <mailman.1138.1356283393.4670.stsetch2-pcs@snf.stanford.edu>

The vendor is having problems repairing the generator.  Since it is an engineering prototype unit,  it does not behave like a standard generator.  The best guess for fixing it right now is 4/23. 



From eenriquez at snf.stanford.edu  Fri Apr 20 14:25:54 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 20 Apr 2012 14:25:54 -0700
Subject: Comment stsetch2 SNF 2012-04-20 14:25:54: Update RF generator
Message-ID: <mailman.1139.1356283393.4670.stsetch2-pcs@snf.stanford.edu>

We have two rf generators that are being repaired by two different vendors.  Both vendors estimate that the generator will not be repaired until late next week (~ 4/27)



From eenriquez at snf.stanford.edu  Wed Apr 25 18:00:23 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 25 Apr 2012 18:00:23 -0700
Subject: Comment stsetch2 SNF 2012-04-25 18:00:22: Update RF generator
Message-ID: <mailman.1140.1356283393.4670.stsetch2-pcs@snf.stanford.edu>

One of the generators has been repaired and is ready for shipment.  Before MKS can ship the unit, they wanted and email from Stanford procurement which states that it is OK to send an invoice that is less than the PO amount.  Mary sent an email today to MKS.  If all goes well, the generator will ship out tomorrow from NY and be here on Monday.  It will take about 4-6 hours to install.