Problem stsetch2 SNF 2012-04-04 17:23:54: Rf source not going to set point
mcvittie at snf.stanford.edu
mcvittie at snf.stanford.edu
Wed Apr 4 17:23:55 PDT 2012
For a 800 unswitched O2 clean, set point is 800w but source is only getting to 617w. For switched process (jim-etch-1) the set points are 2500/2000w but I am only getting 2170/1713w. Could not get serial connection to work between laptop and generator to see what generator thinks it is doing. Process did not give error although power was way low.
jim
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