Problem stsetch2 SNF 2012-04-04 17:23:54: Rf source not going to set point

mcvittie at snf.stanford.edu mcvittie at snf.stanford.edu
Wed Apr 4 17:23:55 PDT 2012


For a 800 unswitched O2 clean, set point is 800w but source is only getting to 617w. For switched process (jim-etch-1) the set points are 2500/2000w but I am only getting 2170/1713w.  Could not get serial connection to work between laptop and generator to see what generator thinks it is doing. Process did not give  error although power was way low. 
  jim




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