From eenriquez at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Shutdown stsetch2 SNF 2012-08-17 16:25:11: no process cooling water Message-ID: <24465957.168.1345245912090.JavaMail.coral@shine> From cbaxter at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Comment stsetch2 SNF 2012-08-17 18:06:28: Update Message-ID: <26549324.195.1345251988088.JavaMail.coral@shine> Having problem with main backing not staying on.. From cbaxter at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Comment stsetch2 SNF 2012-08-17 18:15:04: Update Message-ID: <26635471.196.1345252505122.JavaMail.coral@shine> The main backing pump is back on, will let leave the system at shutdown overnight to mak sure drypump stayed on... From cbaxter at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Shutdown stsetch2 SNF 2012-08-17 16:25:11: no process cooling water Message-ID: <16399186.203.1345327980774.JavaMail.coral@shine> System back to normal operation.. From npapte at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Shutdown stsetch2 SNF 2012-09-07 02:41:27: wafer lost during transfer Message-ID: <21379232.67.1347010888191.JavaMail.coral@shine> the wafer seems to have fallen during transfer after the etch. please retrieve the warfer! From eenriquez at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Shutdown stsetch2 SNF 2012-09-07 02:41:27: wafer lost during transfer Message-ID: <28556090.71.1347032391815.JavaMail.coral@shine> Recovered user's wafer. Replaced a broken ceramic clamp finger. Cycled wafers and ran an O2 clean. From insun at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: insun at snf.stanford.edu (insun at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Problem stsetch2 SNF 2012-09-08 11:58:29: Error in PMC1 standard process step Message-ID: <17004212.84.1347130709696.JavaMail.coral@shine> I tried to run O2 clean 10min 5C, but a red allert raised at the start of dep/etch step: "13.56MHz coil forward power rose above the alarm level." I clicked 'retry' button next to "PMC1 standard process step" in "operations in fault step" window, but it did not work. could not proceed any further. From cbaxter at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Problem stsetch2 SNF 2012-09-08 11:58:29: Error in PMC1 standard process step Message-ID: <3096544.6.1347289999513.JavaMail.coral@shine> Reboot system and ran O2 clean recipe w/out problem.. From insun at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: insun at snf.stanford.edu (insun at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Shutdown stsetch2 SNF 2012-09-10 14:35:03: PMC1 standard recipe error Message-ID: <22179033.63.1347312903898.JavaMail.coral@shine> I tried to run O2 clean 10min 5C, but a red allert raised at the start of dep/etch step: "13.56MHz coil forward power rose above the alarm level." I clicked 'retry' button next to "PMC1 standard process step" in "operations in fault step" window, but it did not work. This is the same problem I reported last Saturday. Mary recommended to shut down the tool. Best, From eenriquez at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Shutdown stsetch2 SNF 2012-09-10 14:35:03: PMC1 standard recipe error Message-ID: <29301058.68.1347327608488.JavaMail.coral@shine> Reset the rf generator. Ran smooshal recipe and o2 clean with no problems. From eenriquez at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Shutdown stsetch2 SNF 2012-10-09 07:51:34: foreline trap removal Message-ID: <4051526.13.1349794294322.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Shutdown stsetch2 SNF 2012-10-09 07:51:34: foreline trap removal Message-ID: <15956463.27.1349818338194.JavaMail.coral@shine> Foreline removal has been rescheduled. From eenriquez at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Comment stsetch2 SNF 2012-06-01 15:09:50: running a little hot Message-ID: <17613437.77.1349965881004.JavaMail.coral@shine> archived From eenriquez at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Comment stsetch2 SNF 2012-08-17 18:06:28: Update Message-ID: <31961747.78.1349965885052.JavaMail.coral@shine> archived From eenriquez at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Comment stsetch2 SNF 2012-08-17 18:15:04: Update Message-ID: <26834023.79.1349965893139.JavaMail.coral@shine> archived From mislam at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Problem stsetch2 SNF 2012-10-13 14:57:45: LL not venting Message-ID: <14385878.129.1350165466390.JavaMail.coral@shine> It shows a wafer on the carousel not there is no wafer. WOn't vent or map carousel. From eenriquez at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Problem stsetch2 SNF 2012-10-13 14:57:45: LL not venting Message-ID: <10783949.10.1350316835184.JavaMail.coral@shine> Closed the door between the LL and chamber. Cycled wafers From mtan at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Problem stsetch2 SNF 2012-10-20 13:33:56: scheduler fault keeps on showing up causing process to be aborted. Message-ID: <5325888.78.1350765237581.JavaMail.coral@shine> From cbaxter at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Problem stsetch2 SNF 2012-10-20 13:33:56: scheduler fault keeps on showing up causing process to be aborted. Message-ID: <9124787.0.1350831075762.JavaMail.coral@shine> Reboot system From eenriquez at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Shutdown stsetch2 SNF 2012-10-22 11:35:54: Bad electrode flow switch Message-ID: <23912166.14.1350930954998.JavaMail.coral@shine> Replacing flow switch From eenriquez at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Comment stsetch2 SNF 2012-10-22 15:10:44: Update Message-ID: <3583938.26.1350943845117.JavaMail.coral@shine> Replaced flow meter. Need to test the system. From mdickey at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Shutdown stsetch2 SNF 2012-10-22 11:35:54: Bad electrode flow switch Message-ID: <26577567.37.1351012462119.JavaMail.coral@shine> Replaced lip seal and water flow switch From cachang at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Problem stsetch2 SNF 2012-10-24 15:04:10: substrate lift problem Message-ID: <26719064.78.1351116251072.JavaMail.coral@shine> Sent a test wafer in for chamber cleaning and recipe seasoning. Saw this problem and couldn't get the wafer out. Also the temperature from thermo-couple showed 33.5C instead of 10-15C. From eenriquez at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Problem stsetch2 SNF 2012-10-24 15:04:10: substrate lift problem Message-ID: <26594243.79.1351122718422.JavaMail.coral@shine> Adjusted the substrate lift position sensor (down). Cycled wafers and ran O2 plasma. From cachang at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Problem stsetch2 SNF 2012-10-30 21:57:20: Wafer stuck in the chamber Message-ID: <4746322.89.1351659441424.JavaMail.coral@shine> After the process was done, the transfer robot didn't go in to move the processed wafer out. Tried manual operation, but it didn't work. From cachang at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Comment stsetch2 SNF 2012-10-30 22:05:15: Wafer stuck in the chamber Message-ID: <27779530.90.1351659915633.JavaMail.coral@shine> Could you please put the wafer in slot 5 of the wafer box? I left my wafer box near the monitor. Will come back on 10/31 morning (~11am). Thanks, cachang From cachang at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Comment stsetch2 SNF 2012-10-30 22:34:06: update Message-ID: <1230403.91.1351661647167.JavaMail.coral@shine> Got my wafer out. From eenriquez at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Problem stsetch2 SNF 2012-10-30 21:57:20: Wafer stuck in the chamber Message-ID: <16813171.102.1351697807183.JavaMail.coral@shine> User recovered the wafer. Cycled wafer through the system with no problems. From eenriquez at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Comment stsetch2 SNF 2012-10-30 22:05:15: Wafer stuck in the chamber Message-ID: <9616377.103.1351697816190.JavaMail.coral@shine> User recovered the wafer. Cycled wafer through the system with no problems. From eenriquez at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Comment stsetch2 SNF 2012-10-30 22:34:06: update Message-ID: <15705325.104.1351697828208.JavaMail.coral@shine> Archived From npapte at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Problem stsetch2 SNF 2012-11-08 15:42:17: thick wafer fails leak check Message-ID: <28248892.51.1352418137751.JavaMail.coral@shine> I have a a couple of bonded wafer stacks of ~1140 um. They fail the leak check (>200 mTorr/min). The usual 500 um wafer seems OK (~15 mTorr/min) From eenriquez at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Problem stsetch2 SNF 2012-11-08 15:42:17: thick wafer fails leak check Message-ID: <19560686.0.1352475283077.JavaMail.coral@shine> User's wafer problem. Please see staff if you need help running non standard wafers. From eenriquez at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Comment stsetch2 SNF 2012-11-09 15:28:09: Replaced wafer lip seal Message-ID: <28596532.28.1352503690620.JavaMail.coral@shine> From mdickey at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Problem stsetch2 SNF 2012-11-13 08:37:47: CF4 Message-ID: <8569405.9.1352824667794.JavaMail.coral@shine> Out of CF4. Replacement has been ordered From mdickey at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Problem stsetch2 SNF 2012-11-13 08:37:47: CF4 Message-ID: <14112795.10.1352824682813.JavaMail.coral@shine> Not used on this tool From minchieh at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: minchieh at snf.stanford.edu (minchieh at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Shutdown stsetch2 SNF 2012-11-26 14:22:25: wafer lost inside Message-ID: <5251976.42.1353968545939.JavaMail.coral@shine> From cbaxter at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Shutdown stsetch2 SNF 2012-11-26 14:22:25: wafer lost inside Message-ID: <16625554.54.1353986073069.JavaMail.coral@shine> Wafer broke inside the chamber, vented chamber and vacuum wafer chips. Wiped down chamber with ipa and ran O2 plasma clean. From paulyoon at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: paulyoon at snf.stanford.edu (paulyoon at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Problem stsetch2 SNF 2012-11-27 14:00:36: Something wrong with pressure , temperature and particles Message-ID: <31958869.2.1354053637058.JavaMail.coral@shine> Hi. Tool condition is wrong. Pressure and temperature is wrong to previous condition. Leak cheking pressure Set point : 25mTorr/min current value : 189mTorr/min Platen chiller temperature previous value : 0 and 37.5C currnet value : 12 and 35C When I pulled out my wafer, there was some kind of particles on the back side. From mtang at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Shutdown stsetch2 SNF 2012-11-27 14:13:32: User reports high He backside and unstable temp Message-ID: <24130692.3.1354054412509.JavaMail.coral@shine> User reports that the backside He pressure which usually, runs about 25, but now is ~ 100 (?) Also he reports the temperature drifts during the process. From cbaxter at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Shutdown stsetch2 SNF 2012-11-27 14:13:32: User reports high He backside and unstable temp Message-ID: <1122203.12.1354060727017.JavaMail.coral@shine> The wall and top temp cool down, heat up both top and wall temp back to temp at 150C and 140C. vented chamber and changed lip seal and re-wiped chamber. From cbaxter at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Problem stsetch2 SNF 2012-11-27 14:00:36: Something wrong with pressure , temperature and particles Message-ID: <6524644.13.1354061037027.JavaMail.coral@shine> Ramp up top and wall temp to spec (150C and 140C). and also vented chamber re-wiped down. From paulyoon at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: paulyoon at snf.stanford.edu (paulyoon at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Problem stsetch2 SNF 2012-11-27 23:29:43: "Back side gas flow exceeded" message Message-ID: <19625657.27.1354087784437.JavaMail.coral@shine> During my operation, there was "Back side gas flow exceeded". And it doesn't work. From mtang at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Comment stsetch2 SNF 2012-11-28 09:57:53: Addendum to 11/27 report Message-ID: <29229929.1.1354125474228.JavaMail.coral@shine> Heat exchanger had been shut off, which is why there were particles. Cesar cleaned up, turned back on, and tested. OK as of ~5 pm. From eenriquez at snf.stanford.edu Sun Dec 23 09:23:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:23:03 -0000 Subject: Problem stsetch2 SNF 2012-11-27 23:29:43: "Back side gas flow exceeded" message Message-ID: <1439407.15.1354134491713.JavaMail.coral@shine> Removed broke wafer and cleaned the chamber. Ran an O2 plasma for 10 min., backside He leak rate was 7 mt/min.