December 2012 Archives by author

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Starting: Sun Dec 23 09:23:03 PST 2012
Ending: Sun Dec 23 09:23:03 PST 2012
Messages: 44

• Comment stsetch2 SNF 2012-10-30 22:34:06: update   cachang at snf.stanford.edu
• Problem stsetch2 SNF 2012-10-24 15:04:10: substrate lift problem   cachang at snf.stanford.edu
• Comment stsetch2 SNF 2012-10-30 22:05:15: Wafer stuck in the chamber   cachang at snf.stanford.edu
• Problem stsetch2 SNF 2012-10-30 21:57:20: Wafer stuck in the chamber   cachang at snf.stanford.edu
• Shutdown stsetch2 SNF 2012-11-27 14:13:32: User reports high He backside and unstable temp   cbaxter at snf.stanford.edu
• Shutdown stsetch2 SNF 2012-08-17 16:25:11: no process cooling water   cbaxter at snf.stanford.edu
• Shutdown stsetch2 SNF 2012-11-26 14:22:25: wafer lost inside   cbaxter at snf.stanford.edu
• Comment stsetch2 SNF 2012-08-17 18:06:28: Update   cbaxter at snf.stanford.edu
• Comment stsetch2 SNF 2012-08-17 18:15:04: Update   cbaxter at snf.stanford.edu
• Problem stsetch2 SNF 2012-09-08 11:58:29: Error in PMC1 standard process step   cbaxter at snf.stanford.edu
• Problem stsetch2 SNF 2012-11-27 14:00:36: Something wrong with pressure , temperature and particles   cbaxter at snf.stanford.edu
• Problem stsetch2 SNF 2012-10-20 13:33:56: scheduler fault keeps on showing up causing process to be aborted.   cbaxter at snf.stanford.edu
• Problem stsetch2 SNF 2012-10-13 14:57:45: LL not venting   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2012-11-27 23:29:43: "Back side gas flow exceeded" message   eenriquez at snf.stanford.edu
• Comment stsetch2 SNF 2012-10-30 22:34:06: update   eenriquez at snf.stanford.edu
• Shutdown stsetch2 SNF 2012-10-09 07:51:34: foreline trap removal   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2012-10-30 21:57:20: Wafer stuck in the chamber   eenriquez at snf.stanford.edu
• Comment stsetch2 SNF 2012-06-01 15:09:50: running a little hot   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2012-11-08 15:42:17: thick wafer fails leak check   eenriquez at snf.stanford.edu
• Shutdown stsetch2 SNF 2012-10-22 11:35:54: Bad electrode flow switch   eenriquez at snf.stanford.edu
• Shutdown stsetch2 SNF 2012-08-17 16:25:11: no process cooling water   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2012-10-24 15:04:10: substrate lift problem   eenriquez at snf.stanford.edu
• Comment stsetch2 SNF 2012-08-17 18:15:04: Update   eenriquez at snf.stanford.edu
• Shutdown stsetch2 SNF 2012-09-07 02:41:27: wafer lost during transfer   eenriquez at snf.stanford.edu
• Comment stsetch2 SNF 2012-11-09 15:28:09: Replaced wafer lip seal   eenriquez at snf.stanford.edu
• Shutdown stsetch2 SNF 2012-09-10 14:35:03: PMC1 standard recipe error   eenriquez at snf.stanford.edu
• Comment stsetch2 SNF 2012-08-17 18:06:28: Update   eenriquez at snf.stanford.edu
• Comment stsetch2 SNF 2012-10-22 15:10:44: Update   eenriquez at snf.stanford.edu
• Shutdown stsetch2 SNF 2012-10-09 07:51:34: foreline trap removal   eenriquez at snf.stanford.edu
• Comment stsetch2 SNF 2012-10-30 22:05:15: Wafer stuck in the chamber   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2012-09-08 11:58:29: Error in PMC1 standard process step   insun at snf.stanford.edu
• Shutdown stsetch2 SNF 2012-09-10 14:35:03: PMC1 standard recipe error   insun at snf.stanford.edu
• Problem stsetch2 SNF 2012-11-13 08:37:47: CF4   mdickey at snf.stanford.edu
• Shutdown stsetch2 SNF 2012-10-22 11:35:54: Bad electrode flow switch   mdickey at snf.stanford.edu
• Problem stsetch2 SNF 2012-11-13 08:37:47: CF4   mdickey at snf.stanford.edu
• Shutdown stsetch2 SNF 2012-11-26 14:22:25: wafer lost inside   minchieh at snf.stanford.edu
• Problem stsetch2 SNF 2012-10-13 14:57:45: LL not venting   mislam at snf.stanford.edu
• Problem stsetch2 SNF 2012-10-20 13:33:56: scheduler fault keeps on showing up causing process to be aborted.   mtan at snf.stanford.edu
• Shutdown stsetch2 SNF 2012-11-27 14:13:32: User reports high He backside and unstable temp   mtang at snf.stanford.edu
• Comment stsetch2 SNF 2012-11-28 09:57:53: Addendum to 11/27 report   mtang at snf.stanford.edu
• Shutdown stsetch2 SNF 2012-09-07 02:41:27: wafer lost during transfer   npapte at snf.stanford.edu
• Problem stsetch2 SNF 2012-11-08 15:42:17: thick wafer fails leak check   npapte at snf.stanford.edu
• Problem stsetch2 SNF 2012-11-27 23:29:43: "Back side gas flow exceeded" message   paulyoon at snf.stanford.edu
• Problem stsetch2 SNF 2012-11-27 14:00:36: Something wrong with pressure , temperature and particles   paulyoon at snf.stanford.edu

Last message date: Sun Dec 23 09:23:03 PST 2012
Archived on: Sun Dec 23 09:23:27 PST 2012

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