From eenriquez at snf.stanford.edu Wed Feb 15 07:53:58 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Feb 2012 07:53:58 -0800 Subject: Shutdown stsetch2 SNF 2011-12-15 16:13:53: for renovation Message-ID: Completed renovation work From eenriquez at snf.stanford.edu Wed Feb 15 07:54:12 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Feb 2012 07:54:12 -0800 Subject: Comment stsetch2 SNF 2011-12-13 03:40:27: broken wafer Message-ID: Cleaned the chamber From eenriquez at snf.stanford.edu Wed Feb 15 07:54:23 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Feb 2012 07:54:23 -0800 Subject: Comment stsetch2 SNF 2011-12-08 18:11:36: etch test Message-ID: Archived From eenriquez at snf.stanford.edu Wed Feb 15 07:55:50 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Feb 2012 07:55:50 -0800 Subject: Problem stsetch2 SNF 2010-05-04 20:33:37: Plasma blinks Message-ID: Jim Mcvittie tuned the matching network From eenriquez at snf.stanford.edu Wed Feb 15 07:56:26 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Feb 2012 07:56:26 -0800 Subject: Problem stsetch2 SNF 2010-05-05 08:26:42: huge nonuniformity Message-ID: Archived From eenriquez at snf.stanford.edu Wed Feb 15 07:56:35 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Feb 2012 07:56:35 -0800 Subject: Problem stsetch2 SNF 2010-06-01 21:27:47: caution: high reflected power might occur Message-ID: Archived From eenriquez at snf.stanford.edu Wed Feb 15 07:57:27 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Feb 2012 07:57:27 -0800 Subject: Problem stsetch2 SNF 2010-08-30 21:12:00: Error Report Message-ID: New RF generator firmware problem. Need to clear error and resume process From eenriquez at snf.stanford.edu Wed Feb 15 08:15:05 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Feb 2012 08:15:05 -0800 Subject: Problem stsetch2 SNF 2010-09-27 18:58:15: poor resist selectivity Message-ID: Archived From eenriquez at snf.stanford.edu Wed Feb 15 08:15:13 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Feb 2012 08:15:13 -0800 Subject: Problem stsetch2 SNF 2010-04-02 16:00:02: Rf Generator Overheating -- Use Forward Pw Mode Message-ID: Archived From eenriquez at snf.stanford.edu Wed Feb 15 08:15:19 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Feb 2012 08:15:19 -0800 Subject: Comment stsetch2 SNF 2010-09-29 16:04:32: Installed a flow meter Message-ID: Archived From eenriquez at snf.stanford.edu Wed Feb 15 08:15:30 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Feb 2012 08:15:30 -0800 Subject: Comment stsetch2 SNF 2010-12-07 10:09:14: STS2 Process Pressures Have Dropped by Almost 2X Message-ID: Archived From eenriquez at snf.stanford.edu Wed Feb 15 08:15:40 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Feb 2012 08:15:40 -0800 Subject: Comment stsetch2 SNF 2010-12-09 02:41:10: STS2 -- I am seeing lots of drop out again Message-ID: Archived From jaehlee at snf.stanford.edu Thu Feb 23 14:13:00 2012 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Thu, 23 Feb 2012 14:13:00 -0800 Subject: Shutdown stsetch2 SNF 2012-02-23 14:12:59: broken fingers Message-ID: at least 2 fingers (clamps) were broken in the main chamber. Jim said it's probably due to mechanical misalignmnet. From cbaxter at snf.stanford.edu Thu Feb 23 16:59:16 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 23 Feb 2012 16:59:16 -0800 Subject: Comment stsetch2 SNF 2012-02-23 16:59:15: Broken ceramic finger. Message-ID: Vented chamber most of the ceramic fingers broke, had a hard time removing the clamp assembly, noticed crystallize residue on the cathode assembly and on the bottom of the clamp assembly it looks like we have a coolant leak on the bottom electrode assembly. I turned off the turbo and chiller.