From mtang at snf.stanford.edu Sun Jul 1 09:05:29 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 1 Jul 2012 09:05:29 -0700 Subject: Comment stsetch2 SNF 2012-07-01 09:05:29: Broken wafer chips Message-ID: Elmer came in Friday eve to check this out. Wafer broke inside, leaving chips in the gate valve -- cleaning is an involved process, which will be done on Monday. From eenriquez at snf.stanford.edu Tue Jul 3 14:05:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Jul 2012 14:05:51 -0700 Subject: Shutdown stsetch2 SNF 2012-06-29 17:51:37: wafer slipped and cracked during transport Message-ID: Cleaned the chamber and the gate valve seal. Cycled wafers with no problems. From eenriquez at snf.stanford.edu Tue Jul 3 14:05:57 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Jul 2012 14:05:57 -0700 Subject: Comment stsetch2 SNF 2012-07-01 09:05:29: Broken wafer chips Message-ID: Cleaned the chamber and the gate valve seal. Cycled wafers with no problems. From eenriquez at snf.stanford.edu Tue Jul 3 14:06:13 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Jul 2012 14:06:13 -0700 Subject: Problem stsetch2 SNF 2012-06-01 13:23:38: Needs process qualification Message-ID: Archived From eenriquez at snf.stanford.edu Tue Jul 3 15:03:05 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Jul 2012 15:03:05 -0700 Subject: Problem stsetch2 SNF 2012-05-21 12:01:45: wafer unload very crooked Message-ID: Adjusted the wafer lifter speed . From eenriquez at snf.stanford.edu Tue Jul 10 15:19:58 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 10 Jul 2012 15:19:58 -0700 Subject: Problem stsetch2 SNF 2012-05-22 18:26:22: resist etch rate doubled overnight Message-ID: Jim Mcvittie's process qualification tests indicate that etch rate and profile are good. From eenriquez at snf.stanford.edu Mon Jul 23 14:20:17 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Jul 2012 14:20:17 -0700 Subject: Shutdown stsetch2 SNF 2012-07-23 14:20:16: Defective vacuum pump Message-ID: Need to send out the turbo backing pump for repair. From eenriquez at snf.stanford.edu Thu Jul 26 10:20:32 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Jul 2012 10:20:32 -0700 Subject: Comment stsetch2 SNF 2012-07-26 10:20:31: Pump update Message-ID: Repaired pump should be ready by 7/30. From eenriquez at snf.stanford.edu Mon Jul 30 15:11:34 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Jul 2012 15:11:34 -0700 Subject: Comment stsetch2 SNF 2012-07-30 15:11:33: Pump update Message-ID: Installed rebuilt pump. Now running O2 plasma. We will need to run a process qualification. From eenriquez at snf.stanford.edu Tue Jul 31 08:26:13 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 Jul 2012 08:26:13 -0700 Subject: Shutdown stsetch2 SNF 2012-07-23 14:20:16: Defective vacuum pump Message-ID: Replaced pump. Cycled several wafers. Ran O2 plasma. Will ask Jim or Nancy to run a process qual. From eenriquez at snf.stanford.edu Tue Jul 31 08:26:48 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 Jul 2012 08:26:48 -0700 Subject: Problem stsetch2 SNF 2012-07-31 08:26:47: Needs a process qualification Message-ID: I will ask Jim Mcvittie or Nancy to run a process qual.