From eenriquez at snf.stanford.edu Fri Jun 1 11:10:01 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 1 Jun 2012 11:10:01 -0700 Subject: Comment stsetch2 SNF 2012-06-01 11:10:00: Update Message-ID: Repaired chiller has been installed. Chamber is heating up. It should be read to test by 1pm. From eenriquez at snf.stanford.edu Fri Jun 1 13:21:52 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 1 Jun 2012 13:21:52 -0700 Subject: Shutdown stsetch2 SNF 2012-05-23 13:20:49: Platen chiller is not cooling. Message-ID: Installed repaired chiller. Platen temperature (tc connected to output of platen) is within about 5 C of the chiller temp. Ran two wafer using the Smooth-Shallow recipe with no problems. Please report the platen temperature setpoint and actual (TC meter next to the system) on Coral. Also please turn off the TC meter when done. From eenriquez at snf.stanford.edu Fri Jun 1 13:22:13 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 1 Jun 2012 13:22:13 -0700 Subject: Comment stsetch2 SNF 2012-05-29 07:37:52: Update Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jun 1 13:22:19 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 1 Jun 2012 13:22:19 -0700 Subject: Comment stsetch2 SNF 2012-06-01 11:10:00: Update Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jun 1 13:23:39 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 1 Jun 2012 13:23:39 -0700 Subject: Problem stsetch2 SNF 2012-06-01 13:23:38: Needs process qualification Message-ID: Jim Mcvittie will run a process check. From grahamab at snf.stanford.edu Fri Jun 1 15:09:50 2012 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Fri, 1 Jun 2012 15:09:50 -0700 Subject: Comment stsetch2 SNF 2012-06-01 15:09:50: running a little hot Message-ID: Jim and Elmer ran some tests to check temperature. The thermocouple readout is showing about 6-7C above the lower platen setpoint. Jim's test with temperature dots showed wafer temperature is likely above 84C (highest on the strip he had in the chamber). This is not ideal, but may be in line with last fall. Recommend setting a slightly lower temperature for the lower platen in recipes (4-5C) to account for the higher reading. TC reading is staying fairly constant during the etch despite the readout from the basement having some oscillation (which doesn't seem physically possible). From grahamab at snf.stanford.edu Sat Jun 2 18:19:15 2012 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sat, 2 Jun 2012 18:19:15 -0700 Subject: Comment stsetch2 SNF 2012-06-02 18:19:14: seems to be working okay Message-ID: have run a bunch of wafers with no real issues other than the previously noted higher temperature (easily dealt with) and wafer unloading. etch results are fairly similar to before shutdown, but etch profile still seems a little different. anyone using it should likely be running a test wafer followed by inspection anyways. thanks to everyone who helped finally get the tool back up and running. From eenriquez at snf.stanford.edu Mon Jun 11 07:09:11 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 11 Jun 2012 07:09:11 -0700 Subject: Problem stsetch2 SNF 2012-05-21 10:53:03: Use with caution Message-ID: System has been repaired From eenriquez at snf.stanford.edu Mon Jun 11 07:09:21 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 11 Jun 2012 07:09:21 -0700 Subject: Comment stsetch2 SNF 2012-05-21 10:51:40: Abbreviated update on STSetch2 Message-ID: archived From ysohn at snf.stanford.edu Fri Jun 15 17:17:52 2012 From: ysohn at snf.stanford.edu (ysohn at snf.stanford.edu) Date: Fri, 15 Jun 2012 17:17:52 -0700 Subject: Problem stsetch2 SNF 2012-06-15 17:17:51: wafer lost Message-ID: I used dummy wafer next to the machine for 10min O2 clean 5C. Wafer somehow landed on the chuck weiredly so that it gave a leak test number of 529. So the recipe did not run properly. Then I stopped the recipe and transferred the wafer out from the chamber, but the loading arm came out with nothing. But the computer showed the wafer in the carousel, which isn't really there. No button works at this point. I suppose wafer is somewhere in the middle of carousel and the chamber, cause the gate between them remains open(appears as white on computer). Actually, this is not surprising because several times in the past, I saw wafer sitting not correctly on the loading arm when it was transferred from the chamber. Especially when this kind of failed leak check occurs. From ysohn at snf.stanford.edu Fri Jun 15 18:07:42 2012 From: ysohn at snf.stanford.edu (ysohn at snf.stanford.edu) Date: Fri, 15 Jun 2012 18:07:42 -0700 Subject: Problem stsetch2 SNF 2012-06-15 18:07:42: follw up Message-ID: I somehow got the gate closed and got my wafer out. I tried to transfer the lost wafer from the chamber to carousel but it did not work. From cbaxter at snf.stanford.edu Fri Jun 15 19:57:22 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 15 Jun 2012 19:57:22 -0700 Subject: Problem stsetch2 SNF 2012-06-15 17:17:51: wafer lost Message-ID: Vented chamber and found wafer broken on the top of the chuck. Removed broken wafer and wiped down chamber with ipa. From cbaxter at snf.stanford.edu Fri Jun 15 19:58:05 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 15 Jun 2012 19:58:05 -0700 Subject: Problem stsetch2 SNF 2012-06-15 18:07:42: follw up Message-ID: Recovered broken wafer inside the chamber. From grahamab at snf.stanford.edu Sat Jun 16 11:21:53 2012 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sat, 16 Jun 2012 11:21:53 -0700 Subject: Shutdown stsetch2 SNF 2012-06-16 11:21:52: still errors after broken wafer removed Message-ID: reset temperatures this morning and let it warm up. when trying to run a recipe, there is still an interlock on the RF generators that doesn't appear to be something easily reset using the computer. From cbaxter at snf.stanford.edu Sun Jun 17 16:01:31 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 17 Jun 2012 16:01:31 -0700 Subject: Shutdown stsetch2 SNF 2012-06-16 11:21:52: still errors after broken wafer removed Message-ID: Reset system and that cleared the alarm.. From ysohn at snf.stanford.edu Mon Jun 18 11:08:08 2012 From: ysohn at snf.stanford.edu (ysohn at snf.stanford.edu) Date: Mon, 18 Jun 2012 11:08:08 -0700 Subject: Problem stsetch2 SNF 2012-06-18 11:08:08: chamber heater out of range Message-ID: setpoint was 120. measured temperature was 101~102 From bclee79 at snf.stanford.edu Mon Jun 18 12:50:47 2012 From: bclee79 at snf.stanford.edu (bclee79 at snf.stanford.edu) Date: Mon, 18 Jun 2012 12:50:47 -0700 Subject: Problem stsetch2 SNF 2012-06-18 12:50:47: Process Failure Message-ID: Trying to do O2 clean with dumy wafer but failed to process the cleaning because the chamber temperature didn't reach the setpoint of 120C. On the status screen, it showed that the chamber temperature was 103C and didn't go to 120C. From mcvittie at snf.stanford.edu Mon Jun 18 16:16:24 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Mon, 18 Jun 2012 16:16:24 -0700 Subject: Problem stsetch2 SNF 2012-06-18 12:50:47: Process Failure Message-ID: Reset chamber heater controller. It said it was putting 100% power but actually was not. Temp is now coming up with power out at 50%. Jim From mcvittie at snf.stanford.edu Mon Jun 18 16:17:18 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Mon, 18 Jun 2012 16:17:18 -0700 Subject: Problem stsetch2 SNF 2012-06-18 11:08:08: chamber heater out of range Message-ID: Reset chamber heater controller. It said it was putting out 100% power but actually was not. Temp is now coming up with power out at 50%. Jim From mcvittie at snf.stanford.edu Mon Jun 18 16:20:06 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Mon, 18 Jun 2012 16:20:06 -0700 Subject: Comment stsetch2 SNF 2012-06-02 18:19:14: seems to be working okay Message-ID: Foreline temp setting was only at 25C. It will not affect process but will affect deposition in foreline. Reset setting to 60C. Jim From grahamab at snf.stanford.edu Mon Jun 18 17:57:48 2012 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Mon, 18 Jun 2012 17:57:48 -0700 Subject: Shutdown stsetch2 SNF 2012-06-18 17:57:47: tool responds to no commands Message-ID: tool alarmed for a temperature controller being in manual mode as it was trying to load my first wafer. after clearing alarm, load arm came back out with wafer but also showed a wafer in the chamber. I was unable to delete the wafer in the chamber so I moved it back to the carousel. the carousel now shows two wafers, but I'm unable to map, pump, or vent as it doesn't respond to any commands. I closed and restarted the software, but it still shows the two wafers and I'm still unable to execute any commands. to be clear, there is no wafer in the chamber. From eenriquez at snf.stanford.edu Tue Jun 19 07:59:20 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 19 Jun 2012 07:59:20 -0700 Subject: Shutdown stsetch2 SNF 2012-06-18 17:57:47: tool responds to no commands Message-ID: Ran the chamber leak rate routine in order to close the chamber chamber door. After the door was closed, the system responded normally. Ran 2 wafers with no problems. From mtang at snf.stanford.edu Tue Jun 26 06:26:37 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 26 Jun 2012 06:26:37 -0700 Subject: Shutdown stsetch2 SNF 2012-06-26 06:26:36: No F318/C4F8 Message-ID: C4F8 is running dangerously low. Replacement cylinder was delayed due to purchasing issues. It is due in today. Will update later today. From mtang at snf.stanford.edu Tue Jun 26 13:50:46 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 26 Jun 2012 13:50:46 -0700 Subject: Comment stsetch2 SNF 2012-06-26 13:50:46: Freon 318 due Wednesday Message-ID: The freon replacement cylinder is due Wednesday, Thursday at latest. From latta at snf.stanford.edu Wed Jun 27 16:33:10 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 27 Jun 2012 16:33:10 -0700 Subject: Shutdown stsetch2 SNF 2012-06-26 06:26:36: No F318/C4F8 Message-ID: gas online- qual'ed at stsetch, looks good From latta at snf.stanford.edu Wed Jun 27 16:33:47 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 27 Jun 2012 16:33:47 -0700 Subject: Comment stsetch2 SNF 2012-06-26 13:50:46: Freon 318 due Wednesday Message-ID: yes From mtan at snf.stanford.edu Fri Jun 29 17:51:38 2012 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Fri, 29 Jun 2012 17:51:38 -0700 Subject: Shutdown stsetch2 SNF 2012-06-29 17:51:37: wafer slipped and cracked during transport Message-ID: