Shutdown stsetch2 SNF 2012-05-23 13:20:49: Platen chiller is not cooling.

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jun 1 13:21:52 PDT 2012


Installed repaired chiller.  Platen temperature (tc connected to output of platen) is within about 5 C of the chiller temp.  Ran two wafer using the Smooth-Shallow recipe with no problems.
Please report the platen temperature setpoint and actual (TC meter next to the system) on Coral.  Also please turn off the TC meter when done.




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