Comment stsetch2 SNF 2012-06-01 15:09:50: running a little hot

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Fri Jun 1 15:09:50 PDT 2012


Jim and Elmer ran some tests to check temperature.  The thermocouple readout is showing about 6-7C above the lower platen setpoint.  Jim's test with temperature dots showed wafer temperature is likely above 84C (highest on the strip he had in the chamber).  This is not ideal, but may be in line with last fall.  Recommend setting a slightly lower temperature for the lower platen in recipes (4-5C) to account for the higher reading.  TC reading is staying fairly constant during the etch despite the readout from the basement having some oscillation (which doesn't seem physically possible).  




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