Comment stsetch2 SNF 2012-06-02 18:19:14: seems to be working okay

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Sat Jun 2 18:19:15 PDT 2012


have run a bunch of wafers with no real issues other than the previously noted higher temperature (easily dealt with) and wafer unloading.  etch results are fairly similar to before shutdown, but etch profile still seems a little different.  anyone using it should likely be running a test wafer followed by inspection anyways.  thanks to everyone who helped finally get the tool back up and running.  




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