Problem stsetch2 SNF 2012-06-15 18:07:42: follw up

ysohn at snf.stanford.edu ysohn at snf.stanford.edu
Fri Jun 15 18:07:42 PDT 2012


I somehow got the gate closed and got my wafer out.
I tried to transfer the lost wafer from the chamber to carousel but it did not work.




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