Problem stsetch2 SNF 2012-06-15 17:17:51: wafer lost

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Fri Jun 15 19:57:22 PDT 2012


Vented chamber and found wafer broken on the top of
the chuck. Removed broken wafer and wiped down chamber
with ipa.




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