Problem stsetch2 SNF 2012-06-15 17:17:51: wafer lost
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Fri Jun 15 19:57:22 PDT 2012
Vented chamber and found wafer broken on the top of
the chuck. Removed broken wafer and wiped down chamber
with ipa.
More information about the stsetch2-pcs
mailing list