Problem stsetch2 SNF 2012-06-15 18:07:42: follw up
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Fri Jun 15 19:58:05 PDT 2012
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Problem stsetch2 SNF 2012-06-15 18:07:42: follw up
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Shutdown stsetch2 SNF 2012-06-16 11:21:52: still errors after broken wafer removed
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Recovered broken wafer inside the chamber.
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Problem stsetch2 SNF 2012-06-15 18:07:42: follw up
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Shutdown stsetch2 SNF 2012-06-16 11:21:52: still errors after broken wafer removed
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