Problem stsetch2 SNF 2012-06-18 12:50:47: Process Failure

bclee79 at snf.stanford.edu bclee79 at snf.stanford.edu
Mon Jun 18 12:50:47 PDT 2012


Trying to do O2 clean with dumy wafer but failed to process the cleaning because the chamber temperature didn't reach the setpoint of 120C. 
On the status screen, it showed that the chamber temperature was 103C and didn't go to 120C. 




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