Shutdown stsetch2 SNF 2012-06-18 17:57:47: tool responds to no commands

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Jun 19 07:59:20 PDT 2012


Ran the chamber leak rate routine in order to close the chamber chamber door.  After the door was closed, the system responded normally.  Ran 2 wafers with no problems.




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