From eenriquez at snf.stanford.edu  Thu Mar  1 13:55:33 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 1 Mar 2012 13:55:33 -0800
Subject: Comment stsetch2 SNF 2012-03-01 13:55:32: Update
Message-ID: <mailman.1130.1356283393.4670.stsetch2-pcs@snf.stanford.edu>

Chamber has been cleaned up.  Found the electrode has a large leak.  Now waiting for a quote for price and availability.



From eenriquez at snf.stanford.edu  Thu Mar  8 11:30:46 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 8 Mar 2012 11:30:46 -0800
Subject: Comment stsetch2 SNF 2012-03-08 11:30:45: Update
Message-ID: <mailman.1131.1356283393.4670.stsetch2-pcs@snf.stanford.edu>

Defective part appears to be the wafer lift bellows.  The lead time is 3-4 weeks.  Best estimate for the system to be available is 4/9.



From eenriquez at snf.stanford.edu  Thu Mar  8 11:30:53 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 8 Mar 2012 11:30:53 -0800
Subject: Comment stsetch2 SNF 2012-03-01 13:55:32: Update
Message-ID: <mailman.1132.1356283393.4670.stsetch2-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Wed Mar 21 08:18:59 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 21 Mar 2012 08:18:59 -0700
Subject: Comment stsetch2 SNF 2012-03-21 08:18:58: Update
Message-ID: <mailman.1133.1356283393.4670.stsetch2-pcs@snf.stanford.edu>

Still leaking but we have found all the large leaks.  Now able to leak check in fine leak mode.  Chamber base pressure (turbo off) is about 300 mT . Parts from STS should be here by 3/23.  Best estimate right now for bringing the system up is 3/28 ???