From eenriquez at snf.stanford.edu Wed May 2 16:56:43 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 May 2012 16:56:43 -0700 Subject: Comment stsetch2 SNF 2012-05-02 16:56:41: Update RF generator Message-ID: Repaired generator has been installed but the system faults for "The generator is in local mode and cannot be controlled by this software". Jim Mcvitte is trying to check the generator software setup. We do not have an ETA on the second generator that was also sent out for repair. I should have an update tomorrow. We have also written a purchase request for field service. We are waiting for procurement to send the PO to STS. We do not have an ETA for field service yet. From eenriquez at snf.stanford.edu Fri May 4 06:56:55 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 May 2012 06:56:55 -0700 Subject: Comment stsetch2 SNF 2012-05-04 06:56:55: Update Message-ID: We do not have an ETA on the second generator that was also sent out for repair. I should have an update today. Field service has been tentatively scheduled to be here next week. From eenriquez at snf.stanford.edu Wed May 9 19:37:43 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 May 2012 19:37:43 -0700 Subject: Comment stsetch2 SNF 2012-05-09 19:37:42: Update Message-ID: Delayed field service's arrival until early next week to give ENI's application engineer (RF generator vendor) a chance to resolve the devicenet configuration issue. I will find out tomorrow when the engineer can be here. Submitted a PO to purchase a new generator from STS. From eenriquez at snf.stanford.edu Wed May 16 18:02:46 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 May 2012 18:02:46 -0700 Subject: Comment stsetch2 SNF 2012-05-16 18:02:46: Great news Message-ID: MKS came in and sucessfuly configured the rf generator to work with the STS. Ran several processes with no problems. Jim Mc is now running process quals. From mtang at snf.stanford.edu Mon May 21 10:44:48 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 21 May 2012 10:44:48 -0700 Subject: Shutdown stsetch2 SNF 2012-02-23 14:12:59: broken fingers Message-ID: Thanks all, for your patience. System is OK to use. Many issues were uncovered over the course of the last few months. There will be a summary/assessment of the problems and recommendations for the future. Please see the problem statement for today (5/21/12) for caveats on use of the system. From mtang at snf.stanford.edu Mon May 21 10:45:08 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 21 May 2012 10:45:08 -0700 Subject: Problem stsetch2 SNF 2012-04-04 12:26:39: Needs process qualification Message-ID: See problem/comment for 5/21/12. From mtang at snf.stanford.edu Mon May 21 10:47:02 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 21 May 2012 10:47:02 -0700 Subject: Problem stsetch2 SNF 2011-03-18 17:28:32: Wafer Chuck Not Cooling Properly Message-ID: This may have been at least partly resolved during the recent chamber rebuilds and will need to be confirmed. See problem/comments for 5/21/12. From mtang at snf.stanford.edu Mon May 21 10:51:40 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 21 May 2012 10:51:40 -0700 Subject: Comment stsetch2 SNF 2012-05-21 10:51:40: Abbreviated update on STSetch2 Message-ID: In brief: STSetch2 is available to use. System seems to be operational to pre-Dec. shutdown standards, but is not considered fully qualified. SOI has not yet been tested. Please use with caution and report any issues you encounter. In more details from Jim McV: Brand new generator from STS was installed Friday and tested over the weekend: a. All processes tested so far have run without Rf faults. For Std process qualification, I have run the follow test wafers but have only measured the deposition wafers. a. Dep only process -- Dep rate within 5% of previous rates b. Etch only process at 3 different magnet currents run with large exposed area (94% resist free) c. Base line high frequency switched process run with std. low area patterned wafer. For processes run so far, the flows, pressure and rf switching (transient reflected power) all look similar to what we were getting before last Dec. Note with the data logging on the tool, it is easy to compare tool parameters to old runs. Left to do: a. Measurement evaluation of wafer run so far 1. Resist etch rates 2. Si etch rates for both etch only runs and switched HF trench run. 3. Selective ratios b. Processes still to be tested 1. Wafer temperature rise for std wafer temperature test process 2. SOI/Low frequency bias process From mtang at snf.stanford.edu Mon May 21 10:53:04 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 21 May 2012 10:53:04 -0700 Subject: Problem stsetch2 SNF 2012-05-21 10:53:03: Use with caution Message-ID: System is OK to use, but be aware that it is not fully qualified. See comments for today (5/21/12) for details. SOI module has not been tested. Please run test wafers before committing your device wafers and report any problem or issues you encounter. Thanks for your patience -- Team Etch From grahamab at snf.stanford.edu Mon May 21 12:01:45 2012 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Mon, 21 May 2012 12:01:45 -0700 Subject: Problem stsetch2 SNF 2012-05-21 12:01:45: wafer unload very crooked Message-ID: 2 out of 2 wafers have unloaded extremely crooked. doesn't seem to pose any real harm to the wafers, but they definitely can't be put back in the chamber without venting and straightening them. a small issue in light of recent tool problems. From grahamab at snf.stanford.edu Mon May 21 16:42:24 2012 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Mon, 21 May 2012 16:42:24 -0700 Subject: Shutdown stsetch2 SNF 2012-05-21 16:42:23: low flow on platen chiller Message-ID: generator won't turn on due to cooling issue. Jim said there was no flow for the platen chiller in the basement and is looking into fixing the issue. From eenriquez at snf.stanford.edu Tue May 22 08:55:58 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 May 2012 08:55:58 -0700 Subject: Shutdown stsetch2 SNF 2012-05-21 16:42:23: low flow on platen chiller Message-ID: The chiller pump was not building up pressure. Found the pump cooling fan's screen was completelely blocked by dust. Cleaned the pump and screen. Now cycling wafers using smooth-shallow recipe. From grahamab at snf.stanford.edu Tue May 22 18:26:22 2012 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Tue, 22 May 2012 18:26:22 -0700 Subject: Problem stsetch2 SNF 2012-05-22 18:26:22: resist etch rate doubled overnight Message-ID: Reporting this as a problem and not a shutdown just in case there's someone who desparetely needs the tool and doesn't care at all about resist etch rate, etch profile, or possible consistency between wafers. Etched one test wafer yesterday before the cooling issues. The resist etch rate was similar to before shutdown. The silicon etch rate was also similar to before shutdown. Etch profile was quite a bit different. What was normally a mostly straight sidewall with a slight taper turned into a very barrel-shaped etch. After running two wafers this evening, photoresist etch rate has doubled since yesterday. Feature width has drastically increased and the etch rate is more than 2X what it was yesterday even with slightly decreasing the etch cycle time. Temperatures indicated on the process monitor appear no different than yesterday, but unsure if lower platen temperature reads accurately now or not. Unsure if related to the major misalignment seen upon wafer unloading, but it passes leak checks okay. From eenriquez at snf.stanford.edu Wed May 23 06:48:09 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 May 2012 06:48:09 -0700 Subject: Comment stsetch2 SNF 2012-02-23 16:59:15: Broken ceramic finger. Message-ID: Archived From eenriquez at snf.stanford.edu Wed May 23 06:48:13 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 May 2012 06:48:13 -0700 Subject: Comment stsetch2 SNF 2012-03-08 11:30:45: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed May 23 06:48:17 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 May 2012 06:48:17 -0700 Subject: Comment stsetch2 SNF 2012-03-21 08:18:58: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed May 23 06:48:22 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 May 2012 06:48:22 -0700 Subject: Comment stsetch2 SNF 2012-04-12 12:52:59: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed May 23 06:48:25 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 May 2012 06:48:25 -0700 Subject: Comment stsetch2 SNF 2012-04-19 07:03:49: Update RF generator Message-ID: Archived From eenriquez at snf.stanford.edu Wed May 23 06:48:31 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 May 2012 06:48:31 -0700 Subject: Comment stsetch2 SNF 2012-04-20 14:25:54: Update RF generator Message-ID: Archived From eenriquez at snf.stanford.edu Wed May 23 06:48:36 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 May 2012 06:48:36 -0700 Subject: Comment stsetch2 SNF 2012-04-25 18:00:22: Update RF generator Message-ID: Archived From eenriquez at snf.stanford.edu Wed May 23 06:48:39 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 May 2012 06:48:39 -0700 Subject: Comment stsetch2 SNF 2012-05-02 16:56:41: Update RF generator Message-ID: Archived From eenriquez at snf.stanford.edu Wed May 23 06:48:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 May 2012 06:48:44 -0700 Subject: Comment stsetch2 SNF 2012-05-04 06:56:55: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed May 23 06:48:48 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 May 2012 06:48:48 -0700 Subject: Comment stsetch2 SNF 2012-05-09 19:37:42: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed May 23 06:48:53 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 May 2012 06:48:53 -0700 Subject: Comment stsetch2 SNF 2012-05-16 18:02:46: Great news Message-ID: Archived From eenriquez at snf.stanford.edu Wed May 23 13:20:49 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 May 2012 13:20:49 -0700 Subject: Shutdown stsetch2 SNF 2012-05-23 13:20:49: Platen chiller is not cooling. Message-ID: Platen temp is at around 60 c when the temperature indicated on the screen is at 10c. We will send it out for repair tomorrow. Will update on ETA. From eenriquez at snf.stanford.edu Tue May 29 07:37:53 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 29 May 2012 07:37:53 -0700 Subject: Comment stsetch2 SNF 2012-05-29 07:37:52: Update Message-ID: The chiller is being repaired by the manufacturer They have replaced the pump and flow meter. They are waiting for a by-pass valve. I will get an update on ETA today.