Problem stsetch2 SNF 2012-04-04 12:26:39: Needs process qualification
mtang at snf.stanford.edu
mtang at snf.stanford.edu
Mon May 21 10:45:08 PDT 2012
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Shutdown stsetch2 SNF 2012-02-23 14:12:59: broken fingers
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Problem stsetch2 SNF 2011-03-18 17:28:32: Wafer Chuck Not Cooling Properly
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See problem/comment for 5/21/12.
Previous message:
Shutdown stsetch2 SNF 2012-02-23 14:12:59: broken fingers
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Problem stsetch2 SNF 2011-03-18 17:28:32: Wafer Chuck Not Cooling Properly
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