Problem stsetch2 SNF 2011-03-18 17:28:32: Wafer Chuck Not Cooling Properly

mtang at snf.stanford.edu mtang at snf.stanford.edu
Mon May 21 10:47:02 PDT 2012

Previous message: Problem stsetch2 SNF 2012-04-04 12:26:39: Needs process qualification
Next message: Comment stsetch2 SNF 2012-05-21 10:51:40: Abbreviated update on STSetch2
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

This may have been at least partly resolved during the recent chamber rebuilds and will need to be confirmed.  See problem/comments for 5/21/12.

Previous message: Problem stsetch2 SNF 2012-04-04 12:26:39: Needs process qualification
Next message: Comment stsetch2 SNF 2012-05-21 10:51:40: Abbreviated update on STSetch2
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch2-pcs mailing list