Problem stsetch2 SNF 2012-05-21 12:01:45: wafer unload very crooked

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Mon May 21 12:01:45 PDT 2012


2 out of 2 wafers have unloaded extremely crooked.  doesn't seem to pose any real harm to the wafers, but they definitely can't be put back in the chamber without venting and straightening them.  a small issue in light of recent tool problems.




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