Shutdown stsetch2 SNF 2012-05-21 16:42:23: low flow on platen chiller

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue May 22 08:55:58 PDT 2012


The chiller pump was not building up pressure.  Found the pump cooling fan's screen was completelely blocked by dust.   Cleaned the pump and screen.  Now cycling wafers using smooth-shallow recipe.




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