[stsetch2-pcs] Comment stsetch2 SNF 2013-05-02 10:47:50: Update high He leak rate

elmere at stanford.edu elmere at stanford.edu
Fri May 3 08:58:09 PDT 2013


Cleaned and repositioned the chamber o-ring. Combined chamber + wafer leak ~ 12mT/min.  Ran O2 plasma.


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