[stsetch2-pcs] Shutdown stsetch2 SNF 2013-05-03 23:19:57: Wafer Lost

bclee79 at stanford.edu bclee79 at stanford.edu
Fri May 3 23:19:57 PDT 2013


Wafer isn't unloaded from the chamber. A very important wafer is lost inside the chamber. I'll leave my tweezers and wafer box next the monitor. Please save my wafer and put the wafer inside my wafer box at slot #17.


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