[stsetch2-pcs] Shutdown stsetch2 SNF 2013-05-03 23:19:57: Wafer Lost

elmere at stanford.edu elmere at stanford.edu
Wed May 8 17:15:07 PDT 2013


Found the cooling line connetion to the electrode had a small leak and some coolant  had coated the shaft of the wafer lift pneumatic cylinder. The coating of coolant on the shaft caused the wafer lift to move in a jerky manner.  This caused wafer movement whenever  it is raised or lowered.
Cleaned the cylinder shaft and relubricated.  Cycled 8 wafers with no handling problems.


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