[stsetch2-pcs] Comment stsetch2 SNF 2013-05-06 16:06:55: wafer handling problem

elmere at stanford.edu elmere at stanford.edu
Wed May 8 17:15:16 PDT 2013

Found the cooling line connetion to the electrode had a small leak and some coolant  had coated the shaft of the wafer lift pneumatic cylinder. The coating of coolant on the shaft caused the wafer lift to move in a jerky manner.  This caused wafer movement whenever  it is raised or lowered.
Cleaned the cylinder shaft and relubricated.  Cycled 8 wafers with no handling problems.

More information about the stsetch2-pcs mailing list