[stsetch2-pcs] Problem stsetch2 SNF 2013-05-08 17:21:05: High chamber leak rate

elmere at stanford.edu elmere at stanford.edu
Wed May 8 17:21:05 PDT 2013


The chamber leak rate is high ~ 25 to 85 mT.  The leakrate displayed on the monitor during process is actually the total of the backside helium cooling leak and the chamber leak rate.  The helium leak rate ~ 0 mT.
Found a small cut on the lid o-ring.  The o-ring should be here tomorrow morning.


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