[stsetch2-pcs] Shutdown stsetch2 SNF 2013-05-12 02:53:05: wafer lost in chamber

vuhong at stanford.edu vuhong at stanford.edu
Sun May 12 02:53:06 PDT 2013


Wafer did not come out onto carousel. Wafer not important, was a dummy wafer for cleaning; just toss. 


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