From kevhuang at stanford.edu Thu Feb 2 16:07:19 2006 From: kevhuang at stanford.edu (Huang Kevin) Date: Thu, 2 Feb 2006 16:07:19 -0800 Subject: is STS2 going to be fixed soon? Message-ID: <93586f8c0602021607u269668a9qdd8d07f8e474963@mail.gmail.com> When will it be back up again? Thanks. -- ================================== Kevin Huang Ph.D. Student, Peumans Group Stanford Organic Electronics Lab Dept. of Electrical Engineering Email: kevhuang at stanford.edu Phone: (650) 725-6924 ================================== -------------- next part -------------- An HTML attachment was scrubbed... URL: From edmyers at stanford.edu Thu Feb 2 16:31:48 2006 From: edmyers at stanford.edu (Ed Myers) Date: Thu, 02 Feb 2006 16:31:48 -0800 Subject: is STS2 going to be fixed soon? In-Reply-To: <93586f8c0602021607u269668a9qdd8d07f8e474963@mail.gmail.com > References: <93586f8c0602021607u269668a9qdd8d07f8e474963@mail.gmail.com> Message-ID: <6.2.1.2.2.20060202163011.0412fc50@edmyers.pobox.stanford.edu> Kevin, The pump package has been rebuilt by the vendor and is under testing. When we called them this morning, they indicated it may ship on Friday (2/3). We are like the users waiting and wondering. Ed At 04:07 PM 2/2/2006, Huang Kevin wrote: >When will it be back up again? >Thanks. > >-- >================================== >Kevin Huang >Ph.D. Student, Peumans Group >Stanford Organic Electronics Lab >Dept. of Electrical Engineering >Email: kevhuang at stanford.edu >Phone: (650) 725-6924 >================================== From eenriquez at snf.stanford.edu Fri Feb 3 18:43:27 2006 From: eenriquez at snf.stanford.edu (Elmer Enriquez) Date: Fri, 03 Feb 2006 18:43:27 -0800 Subject: System status Message-ID: <43E414CF.2060302@snf.stanford.edu> Installed rebuilt vacuum pump. It pumps down to about 20 mT but the system does not receive an ON signal from the pump. Still troubleshooting problem. Elmer From kevhuang at stanford.edu Mon Feb 6 17:47:40 2006 From: kevhuang at stanford.edu (Huang Kevin) Date: Mon, 6 Feb 2006 17:47:40 -0800 Subject: STS2 SF6 only recipe Message-ID: <93586f8c0602061747m6f688d4t6d3cc1723fdf1653@mail.gmail.com> Hi, Does anyone has a SF6 isotropic etch recipe for STS2? Thanks. Kevin -------------- next part -------------- An HTML attachment was scrubbed... URL: From kevhuang at stanford.edu Thu Feb 9 20:41:55 2006 From: kevhuang at stanford.edu (Huang Kevin) Date: Thu, 9 Feb 2006 20:41:55 -0800 Subject: SF6 only recipe Message-ID: <93586f8c0602092041nd62e6d5n23c050fb445df5d5@mail.gmail.com> Hi, Does anyone have an SF6 only recipe or any other isotropic Si etch recipe for Stsetch2? Thanks. Kevin -------------- next part -------------- An HTML attachment was scrubbed... URL: