From swleman at stanford.edu Mon Jan 16 15:20:20 2006 From: swleman at stanford.edu (Steven Leman) Date: Mon, 16 Jan 2006 15:20:20 -0800 Subject: wafer stuck in chamber Message-ID: <6.2.3.4.2.20060116151939.048a9eb0@swleman.pobox.stanford.edu> machine not usable until wafer is manually removed. also, please save my wafer. Steve