STSetch2 Errors

Ed Myers edmyers at stanford.edu
Mon Nov 13 08:33:14 PST 2006


All,

The following error is typical if you disable the system before the 
load lock has an opportunity to complete it's pump or vent cycle.  I 
am seeing this error often.  Please allow time for the load lock to 
complete it's sequence before you disable the tool.  On the flip 
side, you should be able to clear the error after you enable the system.

I always get an "LLC3 alarm (red)", and I can not vent and load my wafer

Ed





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