From rik9 at stanford.edu Mon Sep 4 17:32:35 2006 From: rik9 at stanford.edu (Rishi Kant) Date: Mon, 04 Sep 2006 17:32:35 -0700 Subject: STS Reservation deleted 7 pm - midnight (Monday) Message-ID: <44FCC5A3.8030107@stanford.edu> From fumin at stanford.edu Tue Sep 5 21:34:49 2006 From: fumin at stanford.edu (Fu-Min Wang) Date: Tue, 5 Sep 2006 21:34:49 -0700 Subject: stsetch2 available till midnight Message-ID: <1157517289.44fe4fe92672c@webmail.stanford.edu> From gyama at snf.stanford.edu Tue Sep 12 08:06:36 2006 From: gyama at snf.stanford.edu (Gary Yama (SNF)) Date: Tue, 12 Sep 2006 08:06:36 -0700 Subject: wafers not ready, free from 9am, sorry for the late notice Message-ID: <4506CCFC.2020808@snf.stanford.edu> From elmere at stanford.edu Fri Sep 15 15:05:09 2006 From: elmere at stanford.edu (Elmer Enriquez) Date: Fri, 15 Sep 2006 15:05:09 -0700 Subject: STSetcher progress (some good news) Message-ID: <450B2395.7080304@stanford.edu> The bottom line is that the system is still down but the load lock controller issue has been resolved. Currently, we are able to load a wafer into the chamber and unload it. There are two remaning problems however. 1) The process chamber keeps displaying "waiting for auxilary gauge" (it doesn't have an axillary gauge). 2) when running a process, the timer doesn't indicate any time. Both problems could be related. As of 2:30 pm, the field service engineer is speaking with the tool expert in the UK trying to get information about the axillary gauge. The root cause of the load lock controller problem was a combination of a defective power supply module and a modified battery backup battery circuit (modification was performed many years ago). The problem with the load lock controller was that it kept resetting itself every 70 seconds because it constantly received a "lost power" signal from the power supply. The constant resets flooded the serial communication lines with data thus slowing down the rest of the system. When we replaced the power supply, the modified battery backup, damaged the "lost power" circuitry and the load lock controller would exhibit the same symptoms. The load lock controller problem was repaired by restoring the battery backup circuitry back to the standard configuration and installing a new power supply. Elmer From edmyers at stanford.edu Wed Sep 20 10:35:38 2006 From: edmyers at stanford.edu (Ed Myers) Date: Wed, 20 Sep 2006 10:35:38 -0700 Subject: Operating System Upgrad Message-ID: <6.2.5.6.2.20060920102601.02854c18@stanford.edu> All, The current plan is upgrade the software on STSetch2 next week. The conversion of the hardware will take about 2 days. This work is scheduled for Monday and Tuesday Sept. 25th and 26th. I have reserved the tool for these days. Once the software has been upgraded we will need to verify the recipes. I will work on our Smooth-Shallow template, but if you have other special recipes (Not template recipes) please reserve a time slot to run a test wafer. STS plans to be on site through the week to help us through the software conversion. Again please reserve time for 1 test wafer (please no multiple critical wafers) on Wed. and Thurs to test your recipe. Regards, Ed From elmere at stanford.edu Mon Sep 25 14:36:32 2006 From: elmere at stanford.edu (Elmer Enriquez) Date: Mon, 25 Sep 2006 14:36:32 -0700 Subject: STSetcher 2 software upgrade update Message-ID: <45184BE0.7000104@stanford.edu> The software upgrade has gone very smoothly so far. To date, STS has backed up the old software and configuration, installed the new software and is currently transfering recipes. The plan tomorrow is to 1) install a new PLC module and a flash memory chip. 2) Verify the 1/O setup of the new sofware. 3) Run process recipes in manual and auto mode. The system should be ready for process engineering by 4 pm tomorrow. From elmere at stanford.edu Wed Sep 27 18:38:57 2006 From: elmere at stanford.edu (Elmer Enriquez) Date: Wed, 27 Sep 2006 18:38:57 -0700 Subject: STS etcher2 update (good news) Message-ID: <451B27B1.3070006@stanford.edu> STS was finally able to clear up all (??) of the bugs of the new software. The system appears to be fully operational. Ran two recipes in automatic with no problems. Still need to completely exercise the system: 1) operate components in manual 2) power cycle the system 3) verify key processes. Also need to learn the differences in operating tool using the new software. Will meet with Ed Myers, Dick Crane and STS tomorrow to determine the criteria for releasing the system to the users. From edmyers at stanford.edu Thu Sep 28 15:29:36 2006 From: edmyers at stanford.edu (Ed Myers) Date: Thu, 28 Sep 2006 15:29:36 -0700 Subject: STSetch2 Update, 9/28/06 Message-ID: <6.2.5.6.2.20060928152309.03be8eb0@stanford.edu> All, The new software has been installed and needs to be ran. We would like to see the system ran during the evening hours and on the weekend. If you do run the system, please let us know how it performs. One note is, there seems to be a problem with the SOI, low frequency platen processes. Trevor is working on the issues which have been observed. I do not recommend anyone running with the low frequency platen at this time. The Smooth-Shallow recipes seem to run well. Be cautious, and verify your etch rates before committing critical samples. There is a possibility your recipe was not ported over with a 100% accuracy. Regards,