O2 Cleaning

Grant Korgan grant at nanolabz.com
Wed May 30 19:42:19 PDT 2007


Both STS 1 and STS 2 have experienced an extended O2 cleaning process
(5-30-07).  Please be aware that etch rates could temporarily increase due
to this chamber cleaning.

All the best - Grant

Grant Korgan

President, Nanolabz

Cell: (775) 560 8880
grant at nanolabz.com
korgan at snf.stanford.edu
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