From edmyers at stanford.edu  Thu Jan  3 14:10:18 2008
From: edmyers at stanford.edu (Ed Myers)
Date: Thu, 03 Jan 2008 14:10:18 -0800
Subject: STSetch2 Update -Jan. 2008
Message-ID: <6.2.5.6.2.20080103140149.040a81d0@stanford.edu>

All,

I wanted to let everyone know the template recipes are now 
read-only.  It was decided to take this route, since we continually 
see changes being made to these recipes which have caused processing 
problems for your fellow Lab Members.  The read-only approach means 
you can not even change the number of cycles or etch time for the 
recipes.  I have set the default to 1 hour.  If you need a shorter 
time, you will have to abort the process and recover your wafer.

WARNING:  You can be fooled into thinking you changed the etch 
time.  You will get a warning and the new etch time will still be 
shown on the recipe.  However, this value will not be down loaded to 
the etcher and the original 1 hour etch time will be in place.

If anyone has a recipe they want to lock, please let me 
know.  Remember locking the recipe also locks the etch time.

Regards,
Ed