Update

Elmer Enriquez elmere at stanford.edu
Wed Jul 16 18:37:21 PDT 2008


It still has two problems. The insert heater and the foreline heaters 
are not turning on.  The insert heater not heating up is caused by a 
defective relay.  The foreline heater problem is caused by a defective 
temperature sensor.  Called vendor, but unfortunately the technical 
staff were all at Semicon. Waiting for vendor to confirm the part numbers.



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