From chughes at caltech.edu  Thu Mar  6 11:34:03 2008
From: chughes at caltech.edu (chughes at caltech.edu)
Date: Thu, 6 Mar 2008 11:34:03 -0800 (PST)
Subject: Afternoon reservation deleted
Message-ID: <55490.171.64.100.112.1204832043.squirrel@webmail.caltech.edu>

      Afternoon reservation deleted. Sorry for late notice.

      Cameron



From chughes at its.caltech.edu  Tue Mar 18 19:03:13 2008
From: chughes at its.caltech.edu (Cameron Hughes)
Date: Tue, 18 Mar 2008 19:03:13 -0700
Subject: Deep Silicon Etch Recipe
Message-ID: <47E07461.50506@its.caltech.edu>

    Hello all. I am hoping to do some very deep (almost through etch) 50 
um by 50 um trenches in silicon using stsetch2. Does anyone have any 
experience with etches like this? Do people generally just use the "deep 
fast" template? Any help you can give me would be much appreciated; Thanks.

    Cameron