Deep Silicon Etch Recipe

Cameron Hughes chughes at its.caltech.edu
Tue Mar 18 19:03:13 PDT 2008


    Hello all. I am hoping to do some very deep (almost through etch) 50 
um by 50 um trenches in silicon using stsetch2. Does anyone have any 
experience with etches like this? Do people generally just use the "deep 
fast" template? Any help you can give me would be much appreciated; Thanks.

    Cameron



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