STS2 Update -- Getting Results Equal To Before Problems

Jim McVittie mcvittie at cis.Stanford.EDU
Wed Aug 11 14:22:43 PDT 2010

STS2  Users,

With the addition of the zero rf power step to all recipes to the set the
initial direction of the movement of the Load and Tune capacitors, the
etcher seems to be finally working ok. I now have two students, who have
run old recipes from April (with the zero pw step added) and have gotten
results (etch rates, selectivies and profiles) equal to their April
results before all the matching problems.  So things are looking up
regarding STS2.


James (Jim) P. McVittie, Ph.D.	        Sr. Research Scientist 
Paul G. Allen Building                  Electrical Engineering
Stanford Nanofabrication Facility       jmcvittie at
Stanford University             	Office: (650) 725-3640
Rm. 336X, 330 Serra Mall		Lab: (650) 721-6834
Stanford, CA 94305-4075			Fax: (650) 723-4659 

More information about the stsetch2 mailing list