stsetch2 characterization update

Andrew Blake Graham grahamab at stanford.edu
Wed Feb 10 00:46:45 PST 2010


Just an FYI for people looking to use the tool.  We just ran the same recipe we characterized a couple of days before the power outage and, upon SEM inspection, the tool appears to be giving the same results (etch rate, etch profile, etc.).  

Thanks again to everyone involved in getting the tool back up and running.

Andrew



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