From gsarmien at snf.stanford.edu  Mon Dec  4 08:21:43 2000
From: gsarmien at snf.stanford.edu (gsarmien at snf.stanford.edu)
Date: Dec 4, 2000 8:21:43 AM
Subject: Problem svgcoat: wbdiff
Message-ID: <mailman.116.1357938697.25882.svgcoat-pcs@snf.stanford.edu>

thermometer at the HCl pot is not working properly



From martinez at snf.stanford.edu  Mon Dec  4 02:18:53 2000
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Dec 4, 2000 2:18:53 PM
Subject: Problem svgcoat: clear svgcoat
Message-ID: <mailman.117.1357938697.25882.svgcoat-pcs@snf.stanford.edu>

cycled wafers, hot plate temp is stable.



From hopcroft at snf.stanford.edu  Fri Dec 15 01:25:59 2000
From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu)
Date: Dec 15, 2000 1:25:59 AM
Subject: Shutdown svgcoat 2000-12-15 01:25:57: resist on hotplates
Message-ID: <mailman.118.1357938697.25882.svgcoat-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Fri Dec 15 08:55:44 2000
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Dec 15, 2000 8:55:44 AM
Subject: Shutdown svgcoat 2000-12-15 01:25:57: resist on hotplates
Message-ID: <mailman.119.1357938697.25882.svgcoat-pcs@snf.stanford.edu>

Hotplates Cleaned, Tested Ok to use



From dmarx at snf.stanford.edu  Tue Dec 19 05:16:38 2000
From: dmarx at snf.stanford.edu (dmarx at snf.stanford.edu)
Date: Dec 19, 2000 5:16:38 PM
Subject: Problem svgcoat 2000-12-19 17:16:37: SVG Coater
Message-ID: <mailman.120.1357938697.25882.svgcoat-pcs@snf.stanford.edu>

Accidentally had wafer go through prime oven with resist on backside.  What do I need to do?
-David M.



From dmarx at snf.stanford.edu  Tue Dec 19 07:14:42 2000
From: dmarx at snf.stanford.edu (dmarx at snf.stanford.edu)
Date: Dec 19, 2000 7:14:42 PM
Subject: Problem svgcoat 2000-12-19 19:14:40: Resist On Vapor Prime Chuck!
Message-ID: <mailman.121.1357938697.25882.svgcoat-pcs@snf.stanford.edu>

This is a more detailed subject line  for other lab users



From vilanova at snf.stanford.edu  Wed Dec 20 08:09:23 2000
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Dec 20, 2000 8:09:23 AM
Subject: Problem svgcoat 2000-12-19 17:16:37: SVG Coater
Message-ID: <mailman.122.1357938697.25882.svgcoat-pcs@snf.stanford.edu>

Cleaned ,Tested, Ok to use



From martinez at snf.stanford.edu  Thu Dec 21 10:35:55 2000
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Dec 21, 2000 10:35:55 AM
Subject: Problem svgcoat 2000-12-19 19:14:40: Resist On Vapor Prime Chuck!
Message-ID: <mailman.123.1357938697.25882.svgcoat-pcs@snf.stanford.edu>

clear