From davehong at snf.stanford.edu Thu Oct 12 01:21:52 2000 From: davehong at snf.stanford.edu (davehong at snf.stanford.edu) Date: Oct 12, 2000 1:21:52 PM Subject: Problem svgcoat: Vacuum problem Message-ID: I had problem with the Prime Oven. It seems to be not having a good vacuum. I had to push on the top plate to get a good vacuum. From martinez at snf.stanford.edu Thu Oct 12 02:10:49 2000 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 12, 2000 2:10:49 PM Subject: Problem Clear svgcoat: svg vapor prime clear Message-ID: adj vp lid position and angle of contact to bowl. cycled 20 wafers with no vac errors. From caudillo at snf.stanford.edu Mon Oct 16 03:59:36 2000 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Oct 16, 2000 3:59:36 PM Subject: Problem svgcoat: Vac to hmds hot plate is intermitent Message-ID: From martinez at snf.stanford.edu Tue Oct 17 10:38:05 2000 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 17, 2000 10:38:05 AM Subject: Problem Clear svgcoat: clear vapor prime Message-ID: adj chuck level & vac From kalavade at snf.stanford.edu Wed Oct 18 08:31:12 2000 From: kalavade at snf.stanford.edu (kalavade at snf.stanford.edu) Date: Oct 18, 2000 8:31:12 AM Subject: Problem svgcoat: PrimerLosesVacEverytime Message-ID: From vilanova at snf.stanford.edu Wed Oct 18 09:10:35 2000 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 18, 2000 9:10:35 AM Subject: Problem Clear svgcoat: Message-ID: system reinitialized , cleaned working ok. From mahnaz at snf.stanford.edu Wed Oct 18 01:42:38 2000 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Oct 18, 2000 1:42:38 PM Subject: Problem svgcoat: problem with vacum in prime oven Message-ID: From vilanova at snf.stanford.edu Wed Oct 18 01:48:55 2000 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 18, 2000 1:48:55 PM Subject: Problem Clear svgcoat: Message-ID: prime station realigned, tested ok to use From vilanova at snf.stanford.edu Wed Oct 18 02:53:19 2000 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 18, 2000 2:53:19 PM Subject: Problem svgcoat: Message-ID: Do not use vapor prime plate From caudillo at snf.stanford.edu Wed Oct 18 05:40:34 2000 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Oct 18, 2000 5:40:34 PM Subject: Problem svgcoat: primer oven use@Risk Message-ID: From martinez at snf.stanford.edu Thu Oct 19 08:08:17 2000 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 19, 2000 8:08:17 AM Subject: Problem Clear svgcoat: vapor prime clear ? Message-ID: yes. adjusted chamber vacuum, cycled 40 wafers. tested ok, ready for use. From martinez at snf.stanford.edu Thu Oct 19 08:08:36 2000 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 19, 2000 8:08:36 AM Subject: Problem Clear svgcoat: Message-ID: problem cleared From sminne at snf.stanford.edu Thu Oct 19 04:56:06 2000 From: sminne at snf.stanford.edu (sminne at snf.stanford.edu) Date: Oct 19, 2000 4:56:06 PM Subject: Problem svgcoat: prime shakey Message-ID: prime does not break vacuum at the right time lid pulls up against vacuum and vibrates wafer slides on chuck during vacuum prime From pcastle at snf.stanford.edu Thu Oct 19 06:32:15 2000 From: pcastle at snf.stanford.edu (pcastle at snf.stanford.edu) Date: Oct 19, 2000 6:32:15 PM Subject: Problem svgcoat: HMDS vacuum problem? Message-ID: Hello, There seems to be a problem with the vacuum coming on late for the HMDS. The wafers tend to slip around during the HMDS treatment and don't bake or unload correctly. From grupp at snf.stanford.edu Fri Oct 20 01:37:42 2000 From: grupp at snf.stanford.edu (grupp at snf.stanford.edu) Date: Oct 20, 2000 1:37:42 AM Subject: Shutdown svgcoat: Prime problems Message-ID: 1)No hot plate vacuum: wafer slides on chuck 2)drops wafer: lifter not hi enough so track pulls wafer off lifter. it cracked a wafer and may damage lifter. suggest if you try this keep finger on "shut off" to stop if wafer falls before it breaks. From vilanova at snf.stanford.edu Fri Oct 20 09:57:40 2000 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 20, 2000 9:57:40 AM Subject: Problem Clear svgcoat: Message-ID: realigned rail, wafers cycled working ok From vilanova at snf.stanford.edu Fri Oct 20 09:58:05 2000 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 20, 2000 9:58:05 AM Subject: Problem Clear svgcoat: Message-ID: wafer rail realigned From vilanova at snf.stanford.edu Fri Oct 20 10:00:00 2000 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 20, 2000 10:00:00 AM Subject: Shutdown Clear svgcoat: Message-ID: wafer rail realigned ,tested working ok From grupp at snf.stanford.edu Sat Oct 21 11:13:03 2000 From: grupp at snf.stanford.edu (grupp at snf.stanford.edu) Date: Oct 21, 2000 11:13:03 PM Subject: Problem svgcoat: prime drops wafers Message-ID: prime stage is STILL dropping wafers! Lifter needs adjustment From martinez at snf.stanford.edu Mon Oct 23 08:13:13 2000 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 23, 2000 8:13:13 AM Subject: Shutdown svgcoat: chuck vac problem Message-ID: chuck vac line is clogged down time ~ 2 hrs. From martinez at snf.stanford.edu Mon Oct 23 02:09:03 2000 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 23, 2000 2:09:03 PM Subject: Problem svgcoat: vp down for tc Message-ID: ok to use coater module part will be in 10/24/00 From martinez at snf.stanford.edu Mon Oct 23 02:10:18 2000 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 23, 2000 2:10:18 PM Subject: Shutdown Clear svgcoat: ok to use coater¨ Message-ID: vapor prime down until tomorrow 10/24/00 From martinez at snf.stanford.edu Tue Oct 24 11:49:35 2000 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 24, 2000 11:49:35 AM Subject: Problem Clear svgcoat: thermocouple replaced Message-ID: and calibrated From martinez at snf.stanford.edu Tue Oct 24 11:50:29 2000 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 24, 2000 11:50:29 AM Subject: Problem Clear svgcoat: vp ready for use Message-ID: all problems resolved. ready for use