From vilanova at snf.stanford.edu Thu Aug 9 11:16:55 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 9, 2001 11:16:55 AM Subject: Comment svgcoat 2001-08-09 11:16:54: New Indexer Message-ID: Replaced send Indexer ,Cycle Dummy wafers Redy for use. From grupp at snf.stanford.edu Fri Aug 10 02:57:57 2001 From: grupp at snf.stanford.edu (grupp at snf.stanford.edu) Date: Aug 10, 2001 2:57:57 PM Subject: Problem svgcoat 2001-08-10 14:57:54: edge bead spitting Message-ID: Edge bead removal process leaves drops on wafer, making holes in resist! ok w/out edge bead removal. thx, dan From vilanova at snf.stanford.edu Mon Aug 13 08:03:41 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 13, 2001 8:03:41 AM Subject: Problem svgcoat 2001-08-10 14:57:54: edge bead spitting Message-ID: Edge Removal Added to Canister,Tested Dummy wafers , Working ok, ready to use From tkramer at snf.stanford.edu Wed Aug 15 12:53:12 2001 From: tkramer at snf.stanford.edu (tkramer at snf.stanford.edu) Date: Aug 15, 2001 12:53:12 PM Subject: Problem svgcoat 2001-08-15 12:53:08: EBR splattered 1 of 4 wafers Message-ID: Severe EBR splattering: several large splats right in the middle of one of my wafers. The other three were mostly okay (just a few small splats near the edges on 2 of them). This intermittent splattering has been happening for a while. The bowl probably needs to be cleaned more often. From vilanova at snf.stanford.edu Wed Aug 15 02:40:08 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 15, 2001 2:40:08 PM Subject: Problem svgcoat 2001-08-15 12:53:08: EBR splattered 1 of 4 wafers Message-ID: Cleaned white Catch bowl, chuck,, EBR Added to canister , Tested it, working ok , ready to use From sjlee at snf.stanford.edu Tue Aug 21 06:44:43 2001 From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu) Date: Aug 21, 2001 6:44:43 AM Subject: Problem svgcoat 2001-08-21 06:44:42: inconsistent microswitch on left cassette stage Message-ID: sometimes stuck in the "down" position, so it does not recognize new cassettes. From vilanova at snf.stanford.edu Tue Aug 21 07:14:35 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 21, 2001 7:14:35 AM Subject: Problem svgcoat 2001-08-21 06:44:42: inconsistent microswitch on left cassette stage Message-ID: Ran Several Dummy wafers, Left Casette switch,Working ok, Ok to use From bchui at snf.stanford.edu Thu Aug 30 06:50:34 2001 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Aug 30, 2001 6:50:34 PM Subject: Problem svgcoat 2001-08-30 18:50:31: Prime station broke one of my wafers Message-ID: I suspect the chuck has resist on it from previous user which caused my wafer to stick and get caught in the mechanism.--Ben From ericp at snf.stanford.edu Fri Aug 31 01:44:16 2001 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Aug 31, 2001 1:44:16 AM Subject: Problem svgcoat 2001-08-31 01:44:13: prime sta ok now Message-ID: I straightened the wafer lifting rod (rear) on the prime station, and now (after running a dozen wafers to test) it seems to be ok. We removed the broken pieces. From vilanova at snf.stanford.edu Fri Aug 31 08:35:41 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 31, 2001 8:35:41 AM Subject: Problem svgcoat 2001-08-30 18:50:31: Prime station broke one of my wafers Message-ID: Prime Station tested it , run 10 wafers, Working Ok ready to use From vilanova at snf.stanford.edu Fri Aug 31 08:36:06 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 31, 2001 8:36:06 AM Subject: Problem svgcoat 2001-08-31 01:44:13: prime Station Ok Now Message-ID: prime Station Ok now , Ready to use