Problem svgcoat 2001-08-15 12:53:08: EBR splattered 1 of 4 wafers

tkramer at snf.stanford.edu tkramer at snf.stanford.edu
Wed Aug 15 12:53:12 PDT 2001


Severe EBR splattering: several large splats right in the middle of one of my wafers. The other three were mostly okay (just a few small splats near the edges on 2 of them).  This intermittent splattering has been happening for a while.  The bowl probably needs to be cleaned more often.  




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