Problem svgcoat 2001-08-15 12:53:08: EBR splattered 1 of 4 wafers

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Aug 15 02:40:08 PDT 2001


Cleaned  white Catch bowl, chuck,, EBR Added to canister , Tested it, working ok , ready to use




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