Problem svgcoat 2001-08-31 01:44:13: prime sta ok now

ericp at snf.stanford.edu ericp at snf.stanford.edu
Fri Aug 31 01:44:16 PDT 2001


I straightened the wafer lifting rod (rear) on the prime
station, and now (after running a dozen wafers to test)
it seems to be ok.   We removed the broken 
pieces.




More information about the svgcoat-pcs mailing list