Problem svgcoat 2001-08-31 01:44:13: prime sta ok now
ericp at snf.stanford.edu
ericp at snf.stanford.edu
Fri Aug 31 01:44:16 PDT 2001
I straightened the wafer lifting rod (rear) on the prime
station, and now (after running a dozen wafers to test)
it seems to be ok. We removed the broken
pieces.
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