Shutdown svgcoat 2001-12-19 08:04:04: vac chamber

martinez at snf.stanford.edu martinez at snf.stanford.edu
Wed Dec 19 08:37:57 PST 2001


cleaned up several pounds of goop that someone smeared on the vapor prime lid o-ring, and by the way, your Ph.D has been revoked, removed, cleaned, and realigned the rail gaskets for   the vapor prime chamber. cycled 30 wafers with no vac errors.
ready for a thirty wafer run.




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