From yenilmez at snf.stanford.edu Thu Feb 1 11:25:16 2001 From: yenilmez at snf.stanford.edu (yenilmez at snf.stanford.edu) Date: Feb 1, 2001 11:25:16 AM Subject: Problem svgcoat 2001-02-01 11:25:15: Message-ID: cannot disable svgcoat From vilanova at snf.stanford.edu Thu Feb 1 02:14:19 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 1, 2001 2:14:19 PM Subject: Problem svgcoat 2001-02-01 11:25:15: no problem found Message-ID: From anolley at snf.stanford.edu Tue Feb 13 03:35:30 2001 From: anolley at snf.stanford.edu (anolley at snf.stanford.edu) Date: Feb 13, 2001 3:35:30 PM Subject: Problem svgcoat 2001-02-13 15:35:29: HMDS needs to be reset Message-ID: From martinez at snf.stanford.edu Tue Feb 13 05:00:58 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Feb 13, 2001 5:00:58 PM Subject: Problem svgcoat 2001-02-13 15:35:29: clear problem Message-ID: reset gauge to show a value of 24 lbs. (half full) but the gauge will not stay on. there is hmds pesent in the tank. ok to use. From lindaw at snf.stanford.edu Thu Feb 15 04:56:34 2001 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Feb 15, 2001 4:56:34 PM Subject: Problem svgcoat 2001-02-15 16:56:32: almost out of 3612: none in storage cabinet Message-ID: From mahnaz at snf.stanford.edu Fri Feb 16 01:30:36 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Feb 16, 2001 1:30:36 PM Subject: Problem svgcoat 2001-02-15 16:56:32: almost out of 3612: none in storage cabinet Message-ID: has been replaced. From dhelqaq at snf.stanford.edu Tue Feb 20 09:42:40 2001 From: dhelqaq at snf.stanford.edu (dhelqaq at snf.stanford.edu) Date: Feb 20, 2001 9:42:40 AM Subject: Problem svgcoat 2001-02-20 09:42:39: coater not sensing wafer Message-ID: From dhelqaq at snf.stanford.edu Tue Feb 20 09:44:12 2001 From: dhelqaq at snf.stanford.edu (dhelqaq at snf.stanford.edu) Date: Feb 20, 2001 9:44:12 AM Subject: Problem svgcoat 2001-02-20 09:44:11: stage before coater looks crooked Message-ID: From martinez at snf.stanford.edu Tue Feb 20 10:27:56 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Feb 20, 2001 10:27:56 AM Subject: Problem svgcoat 2001-02-20 09:44:11: stage before coater looks crooked Message-ID: reseated coater wafer sensor connector, cycled wafers. From martinez at snf.stanford.edu Tue Feb 20 10:29:22 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Feb 20, 2001 10:29:22 AM Subject: Problem svgcoat 2001-02-20 09:42:39: now sensing Message-ID: coater module is now sensitive From dhelqaq at snf.stanford.edu Tue Feb 20 12:23:35 2001 From: dhelqaq at snf.stanford.edu (dhelqaq at snf.stanford.edu) Date: Feb 20, 2001 12:23:35 PM Subject: Problem svgcoat 2001-02-20 12:23:34: wafer stopping on platform before coater Message-ID: From martinez at snf.stanford.edu Tue Feb 20 01:20:46 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Feb 20, 2001 1:20:46 PM Subject: Problem svgcoat 2001-02-20 12:23:34: wafer stopping on platform before coater Message-ID: npf From pbrink at snf.stanford.edu Tue Feb 20 08:49:54 2001 From: pbrink at snf.stanford.edu (pbrink at snf.stanford.edu) Date: Feb 20, 2001 8:49:54 PM Subject: Problem svgcoat 2001-02-20 20:49:52: program #9 not correct? Message-ID: I dont think program 9 on svgcoat for dispensing PR is correct, somebody has fiddled with it and I dont know its correct settings From vilanova at snf.stanford.edu Wed Feb 21 11:08:32 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 21, 2001 11:08:32 AM Subject: Problem svgcoat 2001-02-20 20:49:52: program #9 , its an and Message-ID: NO Problem Found From cmfaulkn at snf.stanford.edu Fri Feb 23 06:14:16 2001 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: Feb 23, 2001 6:14:16 PM Subject: Problem svgcoat 2001-02-23 18:14:15: delay at coater station Message-ID: 2 out of 9 wafers were delayed for approximately 2 minutes before the coater station would apply vaccum and coat the wafers. From vilanova at snf.stanford.edu Mon Feb 26 08:30:09 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 26, 2001 8:30:09 AM Subject: Problem svgcoat 2001-02-23 18:14:15: checked out coater Message-ID: checked out coater,ran test wafers, No Problem Found ok to use From lian at snf.stanford.edu Tue Feb 27 11:34:44 2001 From: lian at snf.stanford.edu (lian at snf.stanford.edu) Date: Feb 27, 2001 11:34:44 AM Subject: Problem svgcoat 2001-02-27 11:34:41: Message-ID: HMDS is not working. From vilanova at snf.stanford.edu Wed Feb 28 07:11:45 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 28, 2001 7:11:45 AM Subject: Problem svgcoat 2001-02-27 11:34:41: Hmds Tank Reset it Ok to use Message-ID: Hmds Tank Reset it , Ok to Use From vilanova at snf.stanford.edu Wed Feb 28 10:47:34 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 28, 2001 10:47:34 AM Subject: Problem svgcoat 2001-02-28 10:47:34: Out of HMDS Message-ID: Please Do not Rely on SvGcoater to do your HMDS we are out of it , We have a 1/4 gallon in the yellow cabinet for Manual use in Laurel , We are getting the HMDS Either Today 2/28/01 or tomorrow. From vilanova at snf.stanford.edu Wed Feb 28 02:49:58 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 28, 2001 2:49:58 PM Subject: Problem svgcoat 2001-02-28 10:47:34: Out of HMDS Message-ID: HMDS Added to Canister, Tested Working Ok Ready to use.