Problem svgcoat 2001-02-23 18:14:15: delay at coater station

cmfaulkn at snf.stanford.edu cmfaulkn at snf.stanford.edu
Fri Feb 23 06:14:16 PST 2001


2 out of 9 wafers were delayed for approximately 2 minutes before the coater station would apply vaccum and coat the wafers.




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